The numerical analysis of influence of electrostatic and temperature effects on deformation characteristics of layered sensitive element of mems accelerometr | Mekhanika | kompozitsionnykh | materialov i konstruktsii
> Volume 15 > №4 / 2009 / Pages: 527-538

The numerical analysis of influence of electrostatic and temperature effects on deformation characteristics of layered sensitive element of mems accelerometr

,

Abstract:

Research of influence of forces of electrostatic interaction on deformation characteristics of a layered sensitive MEMS accelerometer element is conducted at various ambient temperatures. Dependences between measured acceleration, a deflection of a sensitive element and capacity gap between condenser facings are resulted. Influence of electrostatic forces, arising in a sensor, on MEMS accelerometer parameters and on accuracy of measurements is shown. The coupled electromechanical problem taking into account influence of an external temperature field is solved. Possibility of occurrence of a “noise” signal is shown at the zero external loadings, caused by influence of additional force between mobile facings of the condenser of variable capacity and influence of a temperature field.

0