Maksimov P.V. | Авторы | Mekhanika | kompozitsionnykh | materialov i konstruktsii
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Maksimov P.V.
Maksimov P.V.
,
Trufanov N.A.
0
The numerical analysis of influence of electrostatic and temperature effects on deformation characteristics of layered sensitive element of mems accelerometr
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Volume 15
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№4
/ 2009 / Pages: 527-538